A Higher Order Theory Of Beams And Its Application To The Mems/Nems Analysis And Simulations

A higher order theory for beams based on expansion of the two dimensional (2-D) equations of elasticity into Legendre’s polynomials series has been developed. The 2-D equations of elasticity have been expanded into Legendre’s polynomials series in terms of a thickness coordinate.. Cases of the first and second approximations have been considered in details. For obtained boundary-value problems, a finite element method (FEM) has been used and numerical calculations have been done with MATLAB. Developed theory has been applied for study stress-strain state of the electrostatically and thermally actuated MEMS/NEM.