Czekanski, AleksanderZozulya, Volodymyr V.2018-11-062018-11-06May-18978-1-77355-023-7http://hdl.handle.net/10315/35271http://dx.doi.org/10.25071/10315/35271A higher order theory for beams based on expansion of the two dimensional (2-D) equations of elasticity into Legendre’s polynomials series has been developed. The 2-D equations of elasticity have been expanded into Legendre’s polynomials series in terms of a thickness coordinate.. Cases of the first and second approximations have been considered in details. For obtained boundary-value problems, a finite element method (FEM) has been used and numerical calculations have been done with MATLAB. Developed theory has been applied for study stress-strain state of the electrostatically and thermally actuated MEMS/NEM.enThe copyright for the paper content remains with the authorHigher order beam theoryMEMSNEMSActuatorsComputational MechanicsArticle